ATS FXP™ meets the stringent standards and requirements for fire safety, as set forth in the FM Approval Standards 4922 and 4910 for use in Cleanrooms, without internal sprinklers.
ATS FXP™ductwork meets or exceeds–
Uniform Fire Code Standards
ASTM E-136 Behavior of Materials in a Vertical Tube Furnace at 750°F
SEMI S2 EH&S Guideline for Semiconductor Manufacturing Equipment
SEMI S3 Safety Guideline for Liquid Chemical Heating Systems
SEMI S14 Safety Guideline for Fire Risk Assessment & Mitigation for Semiconductor Manufacturing Equipment
NFPA 318 Standard for the Protection of Semiconductor Facilities
FM 7-7 Semiconductor Fabrication Facilities
Independent Manifold Fire Test on ATS FXP™ Duct
Tests conducted at University of California Testing Lab in Richmond, CA
March 1990 to the Texas Instruments Test Protocol